GS600SU Underfill Dispensing Machine
for Die Form Underfi ll
GS600 SU is a high- speed and high- precision automatic online dispensing system which is developed based on Underfill process requirements of FCBGA/FCCSP.
The system strictly controls the product and adhesive temperature, and intelligently sorts the product operation sequence and the glue replenishment time, reducing the generation of voids and ensuring the operation yield. Meanwhile, it is compatible with international semiconductor communication protocols, and matches the infor- mation management requirements.
■ Application Fields
FCBGA Packaging CUF Application FCCSP Packaging CUF Application SiP Packaging CUF Application
■ Technical Specifications
Application Fields
FCBGA, FCCSP, SIP
Applicable Process
Die Form Underfill
Cleanliness Level
Cleanliness of working area
Class 100 (Class 1000 workshop)
Class 10 (Class 100 workshop)
Transmission
Mechanism
Transmission system
X/Y:Linear motor Z: Servo motor&Screw module
Repeatability (3sigma)
X/Y: ±0.003mm, Z: ±0.005mm
Positioning accuracy (3sigma)
X/Y: ±0.010mm, Z: ±0.015mm
Max. movement speed
X/Y: 1000mm/s
Z: 500mm/s
Max. accelerated velocity
X/Y: 1g, Z: 0.5g
Grating resolution
1 μ m
Z axis movement range(W× D)
3 5 0 mm×4 7 0mm
Z axis height calibration & compensation Method
Laser sensor (Laser sensor)
Laser sensor accuracy
2μ m
Dispensing System
Glue control accuracy
± 3 % / 1mg
Single dot position repeatability CPK>1.0
±25 μ m
Min. nozzle diameter
30 μ m
Min. single dot glue weight
0 .001mg/dot
Max. fluid viscosity
200000cps
Max. jetting frequency
1000Hz
Runner/nozzle heating temperature
Room temperature~200℃
Runner/nozzle heating temp. deviation
± 2 ℃
Applicable adhesive packaging spec.
5CC/10CC/30CC/50CC/70CC
Syringe cooling range
Cools down to 15°C below ambient temp.
Piezo cooling range
Cools down to compressed air source temp.
Track System
Number of tracks
2
Number of belt sections
One piece
Max. track transmission speed
300mm/s
Max. track transmission weight
3kg
Minimum edge clearance
3 mm
Track width adjustment range
60mm~ 162mm Adjustable
Track width adjustment Method
Manual
Track height
910mm~960mm Adjustable
Max. thickness of applicable substrate/carrier
6 mm
Applicable substrate/carrier length range
60mm-325mm
Vacuum suction pressure Range
-50~-80Kpa Adjustable
Bottom heating temperature range
Room temperature~180℃
Bottom heating temp. deviation
≤ ± 1 . 5 ℃
Facilities
Footpri nt W× D× H
2380mm*1550mm*2080mm(Loading&Unloading& display included)
2380mm*1200mm*2080mm(Loading&Unloading included, display excluded)
Weight
1600kg
Power supply
200~240VAC,47~63HZ (Single-phase voltage adaptation power supply)
Electric current
30A
Power
6.4KW
Inhale
(0.5Mpa, 450L/min) ×2
FCBGA Packaging CUF Application
FCCSP Packaging CUF Application
SiP Packaging CUF Application
Special Process Modules
CUF Special Piezoelectric Jetting System
Adhesive insulation + piezoelectric ceramic temperature closed-loop control to avoid system instability caused by temperature influence
Triple Low-level Alarm
Capacitive detection + magnetic detection + system weighing to avoid poor operation caused by lack of glue
Vacuum Adsorption Heating Fixture
The temperature difference of the whole surface of the fixture is ≤ ±1.5°C, and the temperature is monitored and compensated in real time to avoid poor operation caused by product temperature variation during operation
Press-Down Track
The vacuum adsorption fixture always keeps still, and the track moves up and down to avoid poor operation caused by loss of flatness during reciprocating movement of the vacuum adsorption fixture.
Platform-Type Loading & Unloading System
The feeding sequence is automatically sorted, and the operation is completed within the Plasma time limit
Friendly human-machine interface design
Visual system
Positioning and detection functions
Inspection before operation to avoid defective incoming materials
Inspection after operation to prevent batch defects
GS600M Online Visual Dispensing Machine GS600M is a fully- automatic online dispensing platform developed based on the needs of the MEMS industry. It can provide one- stop solutions for on- line ASIC chip encapsulation, precision solder paste dispensing and multiple fool- proof detection, etc. in the MEMS process. High- quality control of the entire production process is realized.The on-line workstation operation can also be selected. Features and AdvantagesOn-line ModeYield ImprovementWork positions are inspected before and after operation, and the fi nal station is professionally inspected to achieve multiple fool proof.Full AutomationThe on- line mode is used to minimize manual intervention.Prevention of Whole Line DowntimeOperation tracks / conveyor tracks are separated, so that shutdown of a single machine does not affect the operation of the whole line. Application FieldsMEMS Microphone MEMS accelerometer MEMS Barometer Technical SpecificationsModel GS600MApplication FieldsDie form packaging of lead frame, substrate, shellApplicable ProcessChip Encapsulation,Solder paste gluing ,Potting ,component reinforcementCleanliness LevelCleanliness of working areaClass 100 (Class 1000 workshop) Class 10 (Class 100 workshop)TransmissionSystemTransmission mechanismsX/Y:Linear motorZ:Servo motor&Screw moduleRepeatability (3sigma)X/Y: ±0.010mm Z: ±0.015mmPositioning accuracy (3sigma)X/Y: ±0.015mm Z: ±0.025mmMax. movement speedX/Y :1000mm/s Z: 500mm/sMax. accelerated velocityX/Y: 1g Z: 0.5gGrating resolution1 μ mZ axis height calibration&compensation MethodLaser sensor (Laser sensor)Laser sensor accuracy±0.01mmDispensingCapabilityDispensing methodPiezo-pump (Mingseal self-developed)Glue control accuracy±3%/1mg(as per actual adhesive specific gravity)Min. single dot glue weight0.001mg/dot(as per actual adhesive specific gravity)Max. fluid viscosity200000cpsMax. jetting frequency1000HzRunner/nozzle heating temperatureRoom temperature~200℃Runner/nozzle heating temp. deviation±2℃FacilitiesFootprint W× D × H2050× 1535×2085mmWeight1.5tPower supply200~240VAC,47~63HZ(Single-phase voltage adaptation power supply)Electric current35APower7KWInhale5.0-7.0 kg/cm2
GS600DD Fully- Automatic Dispensing Machine
For Dam & Fill
GS600DD fully-automatic dispensing machine is a piece of high-stability and high-precision dispensing equipment which is developed based on Dam & Fill process requirements of FCBGA,etc.The equipment meets the needs of the semiconductor industry,is provided with an automatic loading & unloading system, and can automatically realize functions of magazine loading & unloading , dam glue-jetting and underfill glue-jetting. It is compatible with international semi- conductor communication protocols , and matches the information management requirements and unmanned management trends.
System Composition
GS600DD fully- automatic dispensing machine × 1 Magazine automatic loading & unloading machine × 1
Operation Flow
Magazine loading -Dam glue-jetting-Underfill glue-jetting-Magazine unloading
Features and Advantage
Good shock absorption with mineral frame structure to effectively reduce the impact caused by high-speed equipment operation.
Capacitive detection and laser induction detection to avoid product loss caused by insufficient glue amount
Dustproof level 10, meeting the packaging environment requirements.
Automatic dispensing position compensation function to ensure the dispensing accuracy
ESD protection meeting international IEC and ANSI standards.
Glue width detection function to avoid process risks caused by poor dispensing.
Technical Specifications
Model GS600DD
System Composition
GS600DD * 1,Magazine automatic loading & unloading machine * 1
Application Fields
FCBGA,Wire Bonding Encapsulation
Cleanliness Level
Cleanliness of working area
Class 100 (Class 1000 workshop) Class 10 (Class 100 workshop)
Transmission System
Dimensions
770×1650×2100mm
Transmission system
X/Y:Linear motor Z:Servo motor&Screw module
Repeatability (3sigma)
X/Y: ±5 μm Z: ±10 μm
Positioning accuracy (3sigma)
X/Y: ±10 μm Z: ±25 μm
Max. movement speed
X/Y:1300mm/s Z: 500mm/s
Max. accelerated velocity
X/Y:1.3g Z:0.5g
Dispensing range
355mm×595mm
Grating resolution
1 μ m
Visual repetitive matching accuracy
5μ m
Adhesive single-point position accuracy
≤±30 μ m
Z axis height calibration & compensation method
Laser sensor
Laser sensor accuracy
±1 μ m
Z axis spec.
Asynchronous Double-head
Applicable syringe type
5cc, 10cc,30cc,50cc,70cc
Glue weight accuracy
10mg±3%,5mg±5%
Weighing module accuracy
220g/0.1mg
Vision Module
Pixel
500W (2048×2448dpi)
Lens
0.2X telecentric lens
Camera view
35×35mm
Single pixel accuracy
17um
Glue width detection
≥ 170um
AOI FRR (misjudgment rate)
<2.5%
AOI FAR (missing detection rate)
0
Visual positioning method
Mark/Product appearance features
Angle correction capability of the secondary valve relative to the main valve
0-180° (7 ×7mmWorkpiece)
0-3° (110×110mmWorkpiece)
Shooting method
Positioning shot/fly shot
Facilities
Ambient temp. & humidity
25℃±5℃ , 30 ~ 70%
Footprint W× D × H
770×1650×2100mm (w/o Loading & Unloading)